SOUND DETECTION MECHANISM AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a sound detection mechanism wherein distortion in a diaphragm is suppressed while forming the diaphragm with a required thickness. SOLUTION: A silicon nitride film 303 is formed on a film face of a silicon oxide film 302 formed on a support substrate A as a stress relaxation layer, a polycrystal silicon film 304 is formed on a film face of the silicon nitride film 303, part of the polycrystal silicon film 304 acts like the diaphragm B, and a back electrode C comprising the polycrystal silicon film 304 is formed on the film face of the polycrystal silicon film 304 via a spacer C comprising a sacrificial layer. COPYRIGHT: (C)2005,JPO&NCIPI