| 摘要 |
PROBLEM TO BE SOLVED: To improve a dimensional accuracy of each of wiring lines when the wiring lines are formed adjacent to each other and having different widths. SOLUTION: A first plurality of wiring lines WL having a first width are periodically arranged to have a first interval therebetween. Second wiring lines SGL are arranged adjacent to one of the first wiring lines WL. A lower part of the second wiring lines SGL has a second width corresponding to n (n being an positive integer of 2 or higher) of the first width of the first wiring lines SL and (n-1) times the first interval. The upper part of the second wiring lines has n projections having the first width and (n-1) recesses. COPYRIGHT: (C)2005,JPO&NCIPI
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