发明名称 Ultraviolet polarization beam splitter with minimum apodization
摘要 A beamsplitter includes a first fluoride prism and a second fluoride prism. A coating interface is between the first and second fluoride prisms, wherein an overall R(s)*T(p) function of the beamsplitter varies no more than ±2.74% in the range of 40-50 degrees of incidence.
申请公布号 US2004252369(A1) 申请公布日期 2004.12.16
申请号 US20030458629 申请日期 2003.06.11
申请人 ASML HOLDING N.V. 发明人 WILKLOW RONALD A.
分类号 G02B5/08;G02B5/30;G02B27/28;(IPC1-7):G02B5/08 主分类号 G02B5/08
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