PELLICLE FOR MASK

摘要

PROBLEM TO BE SOLVED: To make easily replacable inert gas in a corner part of a pellicle frame and to make efficiently replacable inert gas in the pellicle in a short time.

SOLUTION: A pellicle plate is adhered to the upper end face of a square pellicle frame, and the pellicle frame is provided with an aeration part near each of four corners to connect the inside and the outside of the pellicle. The aeration part is preferably an aeration hole formed in the pellicle frame or is preferably a notch formed in the pellicle frame.

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