IMPRINT PROCESSING DIE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To manufacture an imprint processing die good in the releasability with a polymeric resin, preventing a release agent from entering the groove parts of the recessed part of the die and capable of repeatedly transferring a normal pattern by press processing without producing a toxic gas in the atmosphere. SOLUTION: The imprint processing die is constituted by covering a die with a perfluoropolyether having a functional group chemically reacted with the material of the die. The manufacturing method for the imprint processing mold includes a first process for washing the surface of the imprint process die and a second process for exposing the imprint process die to the perfluoropolyether and may include a third process for allowing the imprint processing die to stand under a heated and humidified condition. COPYRIGHT: (C)2005,JPO&NCIPI