| 摘要 |
PROBLEM TO BE SOLVED: To efficiently heat a material to be heated in a vacuum vessel by an external heating method and to make it possible to rapidly reach a desired degree of vacuum without occluding gas molecules in the atmosphere or discharging occlusion gas in vacuum. SOLUTION: A graphite having high radiation heat is used as a material for preparing a vacuum vessel 6. In order to solve the problem peculiar to the graphite that the gas molecules are accumulated in pores caused by porosity, the surface of vessel 6 is coated with a pyrolytic carbon to prevent the gas molecules from occlusion by the porosity and to remove the discharge of the gas molecules in vacuum. COPYRIGHT: (C)2005,JPO&NCIPI
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