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发明名称
IMMERSION DEVELOPMENT AND RINSE MACHINE AND PROCESS
摘要
申请公布号
EP0321281(A3)
申请公布日期
1990.09.12
申请号
EP19880311941
申请日期
1988.12.16
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
LAMB, WILLIAM E.;HAIKL, VOJTECH;KOWALESKI, JEROME L.;BITTANCOURT, ALAN R.;DAUGHERTY, HARVEY S.
分类号
G03F7/30;H01L21/00;H01L21/027;H01L21/30;(IPC1-7):H01L21/00
主分类号
G03F7/30
代理机构
代理人
主权项
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