| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atomic radical density measuring device capable of measuring the density of an atomic radical with high precision and high sensitivity while miniaturizing and simplifying the device itself. <P>SOLUTION: In a radical generator for radicalizing a raw material gas introduced into a vessel 3 comprises, from the tip side relative to a hollow body 27 provided to be airtightly protrudable to and retreatable from the vessel 3, an atomic light generator 33 for making a gas corresponding to the raw material gas into a plasma to emit an atomic light, a radial absorption part 47 for absorbing the radical generated in the vessel, which is provided adjacently to the generator 33, a light waveguide part 49 for guiding the atomic light emitted from the generator 33 and transmitted by the radical of the radical absorption part 47, and an atomic light detection part 53 for receiving the atomic light guided by the light waveguide part 48 and outputting an electric signal according to the luminous intensity. The atomic radical density can be measured based on the luminous intensity of the atomic light transmitted by the radical in the radical absorption part. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
