| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus which can process an object of manufacturing efficiently, and a manufacturing method. SOLUTION: The manufacturing apparatus comprises, on the basis of a container which can load a plurality of objects to be manufactured as a unit, a conveyance device 500 which carries the container among stages 100, 200 and 300, on the basis of an object picked out of the container as a unit, a conveyance device 400 which carries the object among the stages 100, 200 and 300, and a plurality of processing devices for performing a plurality of processings among the stages 100, 200 and 300. The plural processing devices are arranged along the direction of conveyance in order of processing procedures to be performed instead of arranging the processing devices of the same kind together. COPYRIGHT: (C)2005,JPO&NCIPI |
