EVALUATION METHOD OF RESIST SENSITIVITY, AND METHOD OF MANUFACTURING RESIST

摘要

PROBLEM TO BE SOLVED: To provide an evaluation method of resist sensitivity with high accuracy. SOLUTION: The method includes steps of: exposing the objective resist film to be inspected to form a monitor mark for exposure light quantity with the light quantity for the inspection by using an exposure apparatus; measuring the characteristic quantity for the inspection varying depending on the exposure light quantity from the transferred image for the inspection of the monitor mark for the exposure light quantity which is transferred onto the objective resist film; and calculating the resist sensitivity for the inspection of the objective resist film from the characteristic quantity for the inspection by using sensitivity correction data. COPYRIGHT: (C)2005,JPO&NCIPI