| 摘要 |
PROBLEM TO BE SOLVED: To enhance detection sensitivity while achieving an effective manufacture of a position detector. SOLUTION: At least one grating element 11b out of an index scale 11 and a main sale arranged opposedly to allow relative displacement is coloredly formed by a shielding coloring agent 11a2 to impart a shielding property on an inner wall face of a worked groove 11a1 recessed with a prescribed pitch in a surface part of a substrate 11a, the grating element 11b is easily manufactured thereby without requiring an expensive production facility and great labor and time as in a conventional photolithography process, and a thickness or a height of the grating element 11b is remarkably thickened or heightened to prevent satisfactorily luminous energy of inspection light from getting low, while preventing an interference of the inspection light. COPYRIGHT: (C)2005,JPO&NCIPI
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