| 摘要 |
PROBLEM TO BE SOLVED: To simplify and facilitate exchanging work of energy line transmission thin film. SOLUTION: The device comprises an energy line generator 51 arranged in a vacuum vessel and generating energy line, an extraction window 21 and a detaching tool 38 for detachably attaching the extraction window 21 on the vacuum vessel 15. The extraction window 21 is formed with a main body and a thin film 23 formed with a material transmitting the energy line, and is combined with the main body 22. Various processes are executed in the air using the energy line extracted from the extraction window 21. The energy line diffuses in the air by dispersion and spatially uniformly disperses in a process objective material, which promotes processing accuracy. The extraction window is made a unit and easily attached and exchanged so that production efficiency by processing is improved. COPYRIGHT: (C)2005,JPO&NCIPI
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