| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe unit that can increase contact pressure with the electrode of a specimen by the use of the elasticity of a substrate, and can prevent the adjacent contact parts mutually from coming in contact, in addition to its manufacturing method. SOLUTION: Probe unit 10 is equipped with a flexible substrate 12 composed of inorganic substance with almost linear edge, a plurality of contact part 16 arranged on the surface of the edge for contacting with electrode of the specimen 24, the lead part 22 connected to the contact part 16, and the conductive film 14 formed on the surface of one side of the substrate. When the force which presses against the surface of the contact part 16 is impressed, the substrate 12 along with the plurality of contact parts 16 in a state of being supported by the edge part of the substrate 12 are deformed elastically. COPYRIGHT: (C)2005,JPO&NCIPI
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