| 摘要 |
PROBLEM TO BE SOLVED: To further improve sensitivity in the magnetic field of a GMR film in a thin-film magnetic sensor for arranging a thin-film yoke made of a soft magnetic material at both the sides of the GMR film having gigantic magnetoresistance effect. SOLUTION: The thin-film magnetic sensor 20 comprises a pair of thin-film yokes 24, 24 that are made of a soft magnetic material and are allowed to oppose via gaps 24a; and the GMR film 26 that is formed between the gaps 24a so that the GMR film 26 can be electrically connected to the thin-film yokes 24, 24. In the thin-film magnetic sensor 20, GL/t<SB>f</SB>ratio is 20 or smaller, S<SB>f</SB>/S<SB>r</SB>ratio is 1 or smaller, (W<SB>m</SB>×t<SB>m</SB>/L<SP>2</SP>) ratio is 0.01 or smaller, FL/GL ratio is 20 or smaller,θis 40°or higher and 90°or smaller, and/or W<SB>g</SB>/W<SB>f</SB>is 1 or smaller. Additionally, the tip section of the thin-film yokes 24, 24 may be made of a soft magnetic material having larger saturation magnetization than that of the rear end section. COPYRIGHT: (C)2005,JPO&NCIPI
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