| 摘要 |
PROBLEM TO BE SOLVED: To enhance the temperature characteristic and pressure responsiveness of a capacitance pressure sensor by reducing the mount of minute substances, contained in a measurement medium and deposited/heaped up on a strain part of a diaphragm, even if a coarse-meshed filter is used. SOLUTION: A first substrate 21 with a fixed electrode 25 formed thereon is joined to the diaphragm 22 to form a vacuum capacitance chamber 31 between these two members. In the middle of an inner face of the strain part 22B of the diaphragm 22, a movable electrode 26 is formed in correspondence with the fixed electrode 25 while a joining/fixing part 24A of a movable body 24 is joined to a middle part of an outer face of the strain part 22B. The movable body 24 integrally comprises a cover part 24B for covering the strain part 22B of the diaphragm 22 from above. A minute gap 33 is formed between an outer circumferential surface part of the cover part 24B and an inner wall surface 40 of a second substrate 23 to prevent minute substances from permeating into an internal space 32 in the second substrate 23. COPYRIGHT: (C)2005,JPO&NCIPI
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