发明名称 LIQUID JETTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a liquid jetting apparatus in which a sufficient quantity of steam and pure water are uniformly mixed to disperse the micronized pure water particle uniformly and to jet the micronized pure water particles to a target at high speed. SOLUTION: The liquid jetting apparatus is provided with a pipe 6 for introducing the pure water and jetting the pure water from one end and a body 3 surrounding the outer periphery of the pipe 6 which includes the one end and for introducing steam to the outer periphery of the pipe 6. The body 3 is provided with an accelerating part A having a cross-section gradually decreased from the upstream toward the downstream, a mixing part B linking to the downstream side of the accelerating part A and forming a flow passage having the minimum cross-section in the vicinity of one end of the body 3 and an opening part C linking to the downstream side of the mixing part B and having a flaring angle for fixing the jetting direction to jet the mixed fluid of the pure water with steam toward the target 20 and to collide with the target 20. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004351321(A) 申请公布日期 2004.12.16
申请号 JP20030152105 申请日期 2003.05.29
申请人 REGAL JOINT CO LTD 发明人 INABA KUNIO
分类号 B08B3/02;B05B7/04;B08B3/08;H01L21/304;(IPC1-7):B05B7/04 主分类号 B08B3/02
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