DRUCKSENSOR UND ZUGEHOERIGES HERSTELLVERFAHREN

摘要

A pressure sensor having high measuring accuracy comprises a ceramic base of hat-like shape having a stable clamping portion, a diaphragm support portion spaced from said clamping portion and a flexible transition portion connecting said clamping portion with said diaphragm support portion; a ceramic diaphragm deformable in dependence on pressure applied thereto, formed unitary in said diaphragm support portion at a top surface thereof; and transducer means applied to a main surface of said diaphragm for converting any deformation of said diaphragm into electric signals representing said pressure applied to said diaphragm. In a manufacturing method for such a pressure sensor the diaphragm and the base comprising the clamping portion are formed in one method step into a homogenous sensor body prior to burning.