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发明名称
Magnetronzerstäubungsanlage und -verfahren
摘要
申请公布号
DE68927920(T3)
申请公布日期
2004.12.16
申请号
DE19896027920T
申请日期
1989.01.19
申请人
OPTICAL COATING LABORATORY INC., SANTA ROSA
发明人
SCOBEY, MICHAEL A.;SEDDON, RICHARD IAN;SEESER, JAMES W.;AUSTIN, RUSSEL R.;LEFABVRE, PAUL M.;MANLEY, BARRY W.
分类号
C23C8/02;C23C14/00;C23C14/08;C23C14/10;C23C14/34;C23C14/35;C23C14/50;C23C14/56;C23C14/58;(IPC1-7):C23C14/56;H01J37/34
主分类号
C23C8/02
代理机构
代理人
主权项
地址
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