| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To surely take out a micro sample using a microscope with a manipulator. <P>SOLUTION: An XYZ-driving mechanism 5 for rotating a probe using a low-vibration stepping motor drives a supported object three-dimensional-directionally. The low-vibration stepping motor 4 is provided between the driving mechanism and a probe holding tool 3 to be fixed respectively thereto. The probe holding tool has a cylindrical or columnar shape, and holds the probe 2. The probe holding tool is attached to a rotary shaft of the low-vibration stepping motor. After the micro sample 1 is taken out by the probe, the low-vibration stepping motor is rotated to rotate the whole probe holding tool. A state of a probe tip is observed therein by an optical microscope, an electron microscope or an ion microscope, and the rotation of the low-vibration stepping motor is stopped when the micro sample is directed along a desired direction. Regulation is executed precisely without contacting with the probe holding tool, by this manner. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
