| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate inspection apparatus for acquiring a detection image having an improved contrast without any distortion. <P>SOLUTION: A substrate inspection system 1 comprises a primary optical system 10 for generating electron beams for irradiating the substrate S as primary beams Bp; an electron detection section 30 that detects secondary electrons, or the like, generated from the substrate S by receiving irradiation with the primary beams Bp, and outputs a one-dimensional or two-dimensional image signal on the surface of the substrate S; and a two-dimensional optical system 20 for forming an image at the electron detection section 30 with secondary electrons, or the like, generated from the substrate S as secondary beams 18s. In the substrate inspection system 1, a laser beam irradiator 70 for irradiating a part wherein the secondary beams 18s on the surface of the substrate S are generated with the laser beams L is further provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
