| 摘要 |
This invention is intended to provide a conveying system that can convey both thin and large plate-shaped members such as LCD, PDP, and organic EL without generating dust or causing damage to the plate-shaped members, to improve the performance of the conveying system in the patent of the applicant of this invention, the 'Plate-shaped Member Conveying System and Washing Device' (Korea Patent No. 0339716) by applying the technology, the 'Plate-shaped Member Conveying System and Washing Device' for which the applicant of this invention has applied for an international patent on March 30, 2004 (Patent Application No. 6-1-2004-0005158-13) and to expand the usage of the system. The plate-shaped member conveying system of this invention conveys a plate-shaped member through such means as follows: Install porous material having a flat part on top of the main body into which pressurized fluid is supplied, seal the space among several porous materials with a horizontal plate to form a layer of pressurized fluid erupting through the porous materials and another pressurized fluid layer between the horizontal sealing plate and the plate-shaped member so that the weight of the plate-shaped member can be supported by the pressurized fluid throughout a large area uniformly. Then the plate-shaped member can be conveyed vertically or inclined without contacting the floating device with its bottom being supported on the conveyor. |
