发明名称 WAFER CONSISTING OF LITHIUM TANTALATE CRYSTAL AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a wafer comprising lithium tantalate used in a SAW manufacturing device that increases the electroconductivity of the wafer and does not deteriorate the characteristic yield of the SAW device. <P>SOLUTION: The lithium tantalate crystal for a surface acoustic wave element is characterized in that the lightness L* value in the L*a*b* color system defined in JIS Z8729 is in a range of 25-70. The wafer using the same increases the electroconductivity and does not deteriorate the characteristic yield. The manufacturing method of the wafer is to hold the wafer of the lithium tantalate crystal which is subjected to the single domain formation treatment for 1 hour or more to 8 hours or less at 400°C or higher to 600°C or lower temperature in a hydrogen gas atmosphere. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2004352533(A) 申请公布日期 2004.12.16
申请号 JP20030149904 申请日期 2003.05.27
申请人 SHIN ETSU CHEM CO LTD 发明人 SHIONO YOSHIYUKI
分类号 C01G35/00;C30B29/30;H01L41/187;H01L41/257;H01L41/39;H01L41/41;(IPC1-7):C30B29/30;H01L41/24 主分类号 C01G35/00
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