| 摘要 |
PROBLEM TO BE SOLVED: To acquire a detection image having the minimum distortion, the maximum S/N, and the maximum contrast. SOLUTION: Reflection electrons having nearly the same radiation energy as that of the incident energy of primary beams are used for forming images. Weight coefficients k<SB>d</SB>, k<SB>s</SB>, k<SB>c</SB>adapted to an inspection purpose are set. An image total evaluation value M(n)=k<SB>d</SB>M<SB>d</SB>+k<SB>s</SB>M<SB>s</SB>+k<SB>c</SB>M<SB>c</SB>is calculated, based on an image distortion evaluation value Md, an image S/N evaluation value Ms, and an image material contrast Mc that are evaluation values determined by digitizing the evaluation characteristics of distortion, S/N, and contrast. Accordingly, inspection conditions for obtaining the optimum substrate surface image are acquired. COPYRIGHT: (C)2005,JPO&NCIPI
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