ANISOTROPIC CONDUCTIVE CONNECTOR AND WAFER INSPECTION DEVICE

摘要

A small wafer inspection device which does not shorten the service life of an inspecting circuit board, can collectively inspect many electrodes under inspection, has good electrical characteristics, and can electrically inspect a high-function integrated circuit, and an anisotropic conductive connector for used in this. The anisotropic conductive connector comprises a plurality of connecting conduction units disposed away from each other and extending in the thickness direction, elastic anisotropic conductive films consisting of insulation parts and formed between the conduction units, and a frame plate supporting the films, wherein the frame plate consists of a metal material having a linear thermal expansion coefficient of 3x10<-6> to 3x10<-5>K<-1>, the connecting conduction unit consists of conductive particles, having a number average particle size of 20-80 mum and showing magnetism, that are closely filled in an elastic polymer material, the conductive particle is formed on the surface thereof with a coating layer consisting of noble metal at least 20 nm in thickness, the durometer hardness of the connecting conduction unit is 10-35, and an electric resistance between connecting conduction units is at least 10 Mohm.