METHOD OF ETCHING, ETCHING APPARATUS AND PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE,申请号KR20047008487-传众专利搜索

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发明名称	METHOD OF ETCHING, ETCHING APPARATUS AND PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE
摘要
申请公布号	KR20040105691(A)	申请公布日期	2004.12.16
申请号	KR20047008487	申请日期	2003.06.05
申请人		发明人
分类号	H01L21/306;C23F1/00;C23F1/30;H01L21/302;H01L21/304;H01L21/311	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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