| 摘要 |
PROBLEM TO BE SOLVED: To form a plated film having a high uniformity within the surface of a substrate and uniformly etch the film, even when the substrate has a thinned electric power-supplying layer. SOLUTION: The electrolysis method comprises arranging a substrate W and a counter electrode plate 20 so as to face each other, filling a space between the substrate W and the counter electrode plate 20 with an electrolytic solution, supplying an electric power between them and electrolyzing the solution. The method further includes arranging a diaphragm 22 between the substrate W and the counter electrode plate 20, and supplying the electrolytic solutions Q<SB>1</SB>and Q<SB>2</SB>having different resistivities respectively to a substrate side region and a counter electrode side region, which are divided by the diaphragm 22. COPYRIGHT: (C)2005,JPO&NCIPI
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