COMPOSITE SUBSTRATE, MANUFACTURING METHOD OF EL ELEMENT AND MANUFACTURING DEVICE OF COMPOSITE SUBSTRATE AND EL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a composite substrate preventing a light emission abnormal point by processing only a part of a defect caused by foreign matter such as dust or dirt involved by dielectric printing or the like after baking, and having a high yield; and to provide the composite substrate and an EL element. SOLUTION: This manufacturing method of a composite substrate and an EL element and a manufacturing device thereof each have a structure having: a first process for forming a first electrode layer on one side of a substrate having an electric insulation property; a second process for forming a thick-film green on the first electrode layer by using a powder or particle-like ceramic material to form a thick-film insulation material layer by baking the thick-film green; and a third process for removing projecting parts by rubbing the projecting parts formed on the surface of the thick-film insulation material layer after baking with a friction head. COPYRIGHT: (C)2005,JPO&NCIPI