| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacity probe having high sensitivity, high accuracy, and high stability, which can be reduced in size and diameter and opposed to an object to be measured at a right angle to a probe axis or from an optional direction. SOLUTION: This probe comprises an electrode head assembly 2, a head base assembly 3, a grounding case 4, and an electric circuit part assembly 5. The assembly 2 includes a measuring electrode 1, first guard member 13 and 14 surrounding the measuring electrode 1, and an insulator 12 inserted between the measuring electrode 1 and the guard members 13 and 14. The assembly 3 includes a first pin 20 connectable to the measuring electrode 1, a second guard member 22 surrounding the first pin 20 and connectable to the first guard member 13, a base case 17 connected to the grounding case 4, and insulators 21 and 23 inserted between the base case 17 and the second guard member 22 and between the second guard member 22 and the first pin 20. COPYRIGHT: (C)2005,JPO&NCIPI
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