| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporator wherein an evaporable material is emitted uniformly in the longitudinal direction. SOLUTION: The evaporator comprises an open-top elongated crucible 10 that holds an evaporable material, an electric heater 12 that covers the upper opening of the crucible 10, generates heat by causing an electric current to flow therein for heating the evaporable material held in the crucible, and has an opening through which the evaporable material vaporized by heating can pass, and a wire 22 that presses and fixes the heater 12 against or to the crucible 12. Further, between the wire 22 and the heater 12, angles 20 are arranged along the longer direction of the crucible 10. The angles 20 allow the pressing force from the wire 22 to exert onto the longer direction of the crucible 10 to bring the heater 12 into close contact with the crucible 10. COPYRIGHT: (C)2005,JPO&NCIPI |
