发明名称 STRIPPING LIQUID FOR RESIST COATING, METHOD FOR ETCHING ALUMINUM PLATE, AND ALUMINUM ETCHED PLATE
摘要 PROBLEM TO BE SOLVED: To provide a stripping liquid for a resist coating to form a fine image, to provide a method for etching an aluminum plate and to provide an aluminum etched plate. SOLUTION: After an alkali-soluble energy ray-sensitive resist coating is formed on an aluminum plate, the resist is exposed to light to form an image and developed with a weak alkaline solution to form the image. Then the exposed aluminum plate is removed by etching with an etching liquid. The stripping liquid is used to further strip the residual resist coating. The stripping liquid for the resist coating comprises at least one kind of alkaline aqueous solution selected from mixture aqueous solutions of alkali metal compounds and sodium hydrogen carbonate. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004354475(A) 申请公布日期 2004.12.16
申请号 JP20030149237 申请日期 2003.05.27
申请人 KANSAI PAINT CO LTD 发明人 BANDO RYOTA;ONISHI SHINSUKE;TAMURA KOICHI
分类号 G03F7/42;C23F1/00;C23F1/20;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
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