| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for a surface acoustic wave device which has surface orientations suitable for the surface acoustic wave device, can be easily processed at a high yield rate by effectively reducing defective processing and is preferably provided with favorable characteristics for downsizing of the device. SOLUTION: The substrate adopted as a piezoelectric substrate for the surface acoustic wave device is formed of a single crystal of langasite (La<SB>3</SB>Ga<SB>5</SB>SiO<SB>14</SB>) whose surface orientations are within ranges of 14.1°≤ϕ≤14.9°, 130°≤θ≤146°and 164°≤ψ≤174°, when they are indicated by Eulerian angles. COPYRIGHT: (C)2005,JPO&NCIPI
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