ELECTROMAGNETIC MIRROR DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electromagnetic mirror device for sufficiently increasing the number of turns of coil without enlarging a mirror substrate. SOLUTION: In the electromagnetic mirror device, a mirror 1 consisting of Cr/Au is provided on the mirror substrate 2. Four link beams 3 are coupled to the mirror substrate 2. Each link beam 3 is coupled to the mirror substrate 2 at a position near a center axis of the mirror substrate from the end of the mirror 1. A drive frame 4 is arranged at a position symmetrical to the center axis of the mirror substrate in right and left of the mirror substrate 2. Each drive frame 4 is coupled to the mirror substrate 2 through the two link beams 3. An electric conductor path 5 made of aluminum is arranged on the drive frame 4. An electrode pad 6 is arranged on both ends of the electric conductor path 5. The drive frame 4 is coupled to the upper face of a base substrate 8. A permanent magnet 10 is arranged on both right and left side parts of a frame 9. COPYRIGHT: (C)2005,JPO&NCIPI