| 发明名称 |
Microfabrication methods and devices |
| 摘要 |
Microfabrication methods and devices in which microscale structural elements are provided in an intermediate polymer layer between two planar substrates. Preferred aspects utilize photoimagable or ablatable polymer layers as the intermediate polymer layer.
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| 申请公布号 |
US2004253545(A1) |
申请公布日期 |
2004.12.16 |
| 申请号 |
US20040835249 |
申请日期 |
2004.04.28 |
| 申请人 |
CALIPER LIFE SCIENCES, INC. |
发明人 |
DAVID CHAZAN |
| 分类号 |
B01L3/00;B81B1/00;F15C5/00;F16K99/00;G03F7/00;(IPC1-7):G03C5/00 |
主分类号 |
B01L3/00 |
| 代理机构 |
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| 地址 |
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