| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin piece polishing method in a double-sided polishing machine capable of polishing a thin piece remarkably thin in comparison with a conventional one. <P>SOLUTION: In this thin piece polishing method in the double-sided polishing machine for polishing a workepiece, while pushing the workpiece to a rotary surface plate, the workpiece 1 is attached to a surface and a back surface of a base plate 5 arranged in a carrier hole 4, and polished. A refrigerated chuck is used to attach the workpiece 1 to the surface and the back surface of the base plate 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
