摘要 |
<P>PROBLEM TO BE SOLVED: To provide a uniform antireflection film without increasing the refractive index of a low refractive index layer and without causing uneven film thickness, cissings and spot-like defects. <P>SOLUTION: In the antireflection film having a low refractive index layer and an antifouling layer on a transparent supporting body in this order, the refractive index of the low refractive index layer is lower than that of the transparent supporting body, the percentage of void thereof is 3 to 50%, and the antifouling layer contains a fluorine-containing compound or a silicon-containing compound, and the film thickness thereof is 1 to 10nm and the coefficient of variation thereof is <50%. <P>COPYRIGHT: (C)2005,JPO&NCIPI |