发明名称 NORMAL TEMPERATURE JOINING METHOD FOR WORKPIECE BY FEMTOSECOND LASER
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a normal temperature joining method of a workpiece where only the surface layer of the workpiece is easy to remove. <P>SOLUTION: This normal temperature joining method of a sapphire board is provided to adjust the wavelength of a femtosecond laser beam 4 by using a femtosecond laser in order to transmit the laser beam 4 through a surface 5a of the sapphire board 5, and to converge the laser beam 4 on a back face 5b of the sapphire board 5. Thus, the laser beam 4 of a super-short pulse is converged on the back face 5b of the sapphire board 5 so that a surface layer 5c such as an absorbing layer or an oxide layer existing on the back face can be removed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2004356475(A) 申请公布日期 2004.12.16
申请号 JP20030154015 申请日期 2003.05.30
申请人 NAMIKI PRECISION JEWEL CO LTD 发明人 TAKEDA HIDETOSHI;NAKATANI TAKAYUKI;FURUTAKI TOSHIRO;SUNAKAWA KAZUHIKO
分类号 B23K26/00;H01L21/02;(IPC1-7):H01L21/02 主分类号 B23K26/00
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