| 摘要 |
PROBLEM TO BE SOLVED: To accurately align a plurality of substrates including at least a substrate having a diaphragm with each other. SOLUTION: A mark 10 for positioning an upper substrate is formed on the surface of an upper substrate 101, which is the substrate having a mirror opening part 103 as a diaphragm region, facing a lower substrate 102, a mark 20 for aligning the lower substrate is formed at a position corresponding to the mark 10 on the surface of a lower substrate 102 facing the upper substrate 101, the alignment is performed by using the mark 10 and mark 20 when the upper substrate 101 and the lower substrate 102 are stuck. COPYRIGHT: (C)2005,JPO&NCIPI
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