| 摘要 |
PROBLEM TO BE SOLVED: To provide a molecular drag pump, integrally formed by press-working a plate material, and easily incorporating split stator blade stages with each other in the molecular drag pump having at least two-split stator blade stages. SOLUTION: A two-split stator blade stages 3 including at least two-split outer disk part 3b and inner disk part 3c supported at both end parts of a stator blade 3a is formed, an oblong rectangular projecting part 3d is projected on the disk parts 3b, 3c along the respective split end parts of the stator blade stages 3, and the adjacent projecting parts 3d abut on each other to assemble the molecular drag pump. COPYRIGHT: (C)2005,JPO&NCIPI
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