CONVEYANCE DEVICE, WASHING DEVICE, CHEMICAL TREATMENT DEVICE, AND MANUFACTURING METHOD FOR CIRCUIT BOARD

摘要

PROBLEM TO BE SOLVED: To suppress increase of tension while suppressing complicatedness of conveyance control. SOLUTION: A washing liquid supply part 4 for letting washing liquid 8 overflow from a washing liquid storage tank 3 is provided to let the washing liquid 8 overflow from the washing liquid storage tank 3. The washing liquid 8 is jetted on a tape board 9 from a washing liquid injection part 1 while floating the tape board 9 on the washing liquid 8 and conveying it to wash the tape board 9. COPYRIGHT: (C)2005,JPO&NCIPI