发明名称 |
Method for process control of semiconductor manufactiring equipment |
摘要 |
A method of fault identification on a semiconductor manufacturing tool includes monitoring tool sensor output, establishing a fingerprint of tool states based on the plurality of sensors outputs, capturing sensor data indicative of fault conditions, building a library of such fault fingerprints, comparing present tool fingerprint with fault fingerprints to identify a fault condition and estimating the effect of such a fault condition on process output. The fault library is constructed by inducing faults in a systematic way or by adding fingerprints of known faults after they occur.
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申请公布号 |
US2004254762(A1) |
申请公布日期 |
2004.12.16 |
申请号 |
US20040791132 |
申请日期 |
2004.03.02 |
申请人 |
HOPKINS MICHAEL;SCANLAN JOHN;O'LEARY KEVIN;CARBERY MARCUS |
发明人 |
HOPKINS MICHAEL;SCANLAN JOHN;O'LEARY KEVIN;CARBERY MARCUS |
分类号 |
C23C16/52;H01L21/00;(IPC1-7):G06F17/50;G06F11/30;G06F15/00;G21C17/00 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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