| 发明名称 |
METHOD FOR PRODUCING HIGHLY PURE SOLUTIONS USING GASEOUS HYDROGEN FLUORIDE |
| 摘要 |
<p>Methods for producing highly pure solutions containing hydrogen fluoride, one or more salts thereof or a mixture of two or more thereof, by adding hydrogen fluoride to at least one anhydrous solvent, wherein the hydrogen fluoride is added to the anhydrous solvent or solvents in the form of a gas or as a liquefied gas or as a mixture of gas and liquefied gas. High purity hydrogen fluoride and ammonium fluoride solutions produced by the inventive method are also disclosed.</p> |
| 申请公布号 |
WO2004108592(A1) |
申请公布日期 |
2004.12.16 |
| 申请号 |
WO2004US17904 |
申请日期 |
2004.06.04 |
| 申请人 |
HONEYWELL INTERNATIONAL INC.;DODD, MICHAEL, A.;SIEVERT, WOLFGANG;MCFARLAND, JOHN |
发明人 |
DODD, MICHAEL, A.;SIEVERT, WOLFGANG;MCFARLAND, JOHN |
| 分类号 |
C01B9/08;C01B7/01;C01B7/09;C01B7/19;C01C1/16;C09K13/08;H01L21/306;H01L21/311;(IPC1-7):C01B7/19 |
主分类号 |
C01B9/08 |
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