| 摘要 |
<p>PURPOSE:To prevent raising of dusts from a wafer surface due to vibration during carrying by providing a carrier cart with a control rod for tilting a wafer storage box at an arbitrary angle to a carrying floor and a control part to move it up and down. CONSTITUTION:A carrier containing a wafer is contained in a box 1 and mounted vertically on a box stand 2. The box stand 2 can tilt at -45 to 45 deg. to floor on demand by operation of a control rod 7 by a tilting controlling part 3. A carrier cart moves on a floor being controlled by a driving controlling part 5 by a driving wheel 4. The carrier cart makes the box stand 2 horizontal when transferring a box, tilts the box stand 2 after transferring the box 1 to the carrier cart, and transfers the box 1 at an inclination of about 15 deg.. After the box arrived at a transferring position, the box stand 2 is returned horizontal and the box 1 is transferred. According to this constitution, it is possible to make a peripheral part of a wafer rear lean against a groove part of a carrier and to fix the wafer by gravity by tilting the box.</p> |
