摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor laser element having a good stable contact. SOLUTION: In the method for manufacturing a semiconductor laser element having a ridge stripe 9, after the formation of the ridge stripe 9, an insulating mask 8 containing Si is oxidized using an etching solution containing hydrogen peroxide to inactivate the surface treatment. COPYRIGHT: (C)2005,JPO&NCIPI
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