摘要 |
PROBLEM TO BE SOLVED: To provide a compact, low-priced spectroscopic analyzer which performs mutually correlated analyses between a plurality of measurement points by an optical system provided commonly. SOLUTION: Laser light from a laser light source 1 for generating laser light as an excitation light is focused on a sample 6 via an objective lens 5. The laser light is scanned by an XY scanner 3 on the sample 6 in a two-dimensional manner. Fluorescence intensity generated by the laser light is measured by a light detector 8. Fluorescence intensity signals from the light detector 8 at least two measurement points on the sample 6 associated with the scanning of the laser light by the XY scanner 3 are correlated with the scanning positional information of the XY scanner 3, to perform mutually correlated calculations between the measurement points by a correlation analyzer 9. COPYRIGHT: (C)2005,JPO&NCIPI
|