| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray imaging method which enables the measurement and inspection of an image at a high speed with high precision, and an apparatus therefor. SOLUTION: This X-ray imaging apparatus is equipped with an X-ray source 2 for irradiating a object 8 to be inspected, a plate (X-ray part removing means) 3 for partially cutting off X rays transmitted through the object 8 to be inspected to pass the same, a receptor 4 provided with a light-emitting substance for emitting light upon the collision with X rays passed through the plate 3 and an imaging device 5 for imaging the light emitted from the receptor 4. Since the conventional integration processing of an image for homogenizing an X-ray image to improve the same is unnecessary, an imaging time can be shortened and the image can be measured and inspected at a high speed with high precision. COPYRIGHT: (C)2005,JPO&NCIPI
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