| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a humidity sensor element capable of ensuring durability under high temperature and high humidity with gas resistance and water resistance. SOLUTION: A humidity sensitive film 4 is formed, and then subjected to a high-temperature and high-humidity treatment. By this high-temperature and high-humidity treatment, the humidity sensitive film 4 is preliminarily exposed to a high-temperature and high-humidity atmosphere before it is exposed to the high-temperature and high-humidity atmosphere to measure the humidity after the completion of the humidity sensor element 10. Since the film state of the humidity sensitive film 4 is laid in an equilibrated state in the high-temperature and high-humidity atmosphere to stabilize the humidity sensing characteristic of the film 4, the humidity sensor element 10 can be used in the state where the humidity sensing characteristic of the film 4 is stabilized. Accordingly, since the durability under high temperature and high humidity can be ensured with the gas resistance and water resistance, the performance of the humidity sensor element 10 can be stably ensured. COPYRIGHT: (C)2005,JPO&NCIPI
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