Device for separating fine solid components, method of manufacturing the device, and method of separating fine solid components using the device

摘要

A device for separating a fine solid component includes a substrate and a diaphragm provided on the substrate. The substrate has a first surface and a second surface opposite the first surface. The substrate has a recess provided in the second surface, a cavity opening to the first surface, and a first through-hole allowing the recess to communicate with the cavity. The diaphragm has a second through-hole formed therein at a position corresponding to the cavity. The second through hole has a diameter smaller than a diameter of the first through-hole. This device and a method using the device enables only small solid components included in fluid having plural solid components having sizes different from each other to pass without clogging.