发明名称 RADIATION-HARDENED TRANSISTOR FABRICATED BY MODIFIED CMOS PROCESS
摘要 An NMOS field effect transistor (1) is made radiation hard by a pair of guard band implants (115) of limited horizontal extent, extending between the source (30A) and drain (30B) along the edge of the transistor body, and extending only to a limited extent into the field insulator and into the interior of the transistor, leaving an unimplanted area in the center of the body that retains the transistor design threshold voltage.
申请公布号 WO2004095583(A3) 申请公布日期 2004.12.16
申请号 WO2004US11818 申请日期 2004.04.16
申请人 RAYTHEON COMPANY 发明人 LUM, WING Y.
分类号 H01L21/8238;H01L23/58;H01L29/10 主分类号 H01L21/8238
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