发明名称 FUNCTIONAL BIMORPH COMPOSITE NANOTAPES AND METHODS OF FABRICATION
摘要 A two-layer nanotape that includes a nanoribbon substrate and an oxide that is epitaxially deposited on a flat surface of the nanoribbon substrate is described. A method for making the nanotape that includes providing plural substrates and placing the substrates in a quartz tube is also described. The oxide is deposited on the substrate using a pulsed laser ablation deposition process. The nanoribbons can be made from materials such as SnO2, ZnO, MgO, AI2O3, Si, GaN, or CdS. Also, the sintered oxide target can be made from materials such as TiO2, transition metal doped TiO2 (e.g., Co0.05Ti0.95O2), BaTiO3, ZnO, transition metal doped ZnO (e.g., Mn0.1Zn0.9O and Ni0.1Zn0.9O), LaMnO3, BaTiO3, PbTiO3, Yba2Cu3Oz, or SrCu2O2 and other p-type oxides. Additionally, temperature sensitive nanoribbon/metal bilayers and their method of fabrication by thermal evaporation are described. Metals such as Cu, Au, Ti, AI, Pt, Ni and others can be deposited on top of the nanoribbon surface. Such devices bend significantly as a function of temperature and are suitable as, for example, thermally activated nanoscale actuators.
申请公布号 WO2004042785(A3) 申请公布日期 2004.12.16
申请号 WO2003US25628 申请日期 2003.08.15
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;YANG, PEIDONG;LAW, MATTHEW;HE, RONGRUI;FAN, RONG;KIM, FRANKLIN 发明人 YANG, PEIDONG;LAW, MATTHEW;HE, RONGRUI;FAN, RONG;KIM, FRANKLIN
分类号 B81B3/00;C30B23/00;C30B29/60;H01L21/203;H01L21/363 主分类号 B81B3/00
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