METHOD FOR FORMING LATTICE IN SUBSTRATE TO INCREASE OUTER QUANTUM EFFICIENCY

摘要

PURPOSE: A method for forming a lattice in a substrate is provided to increase outer quantum efficiency by obtaining a high lattice density and by increasing refraction and scattering of light on a lattice surface. CONSTITUTION: The first mask pattern is formed on a substrate. The second mask pattern is formed on the substrate having the first mask pattern wherein at least a part of the second mask pattern overlaps the first mask pattern but the entire first mask pattern is not covered with the second mask pattern. The substrate including the first and second mask patterns is etched to form a lattice.